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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11703520 B1

PDFFull Text
Date of Patent:
Jul. 18, 2023

Filed:

Sep. 23, 2021

Wafer type sensor unit and data acquisition method using the wafer type sensor unit

Applicant:

Semes Co., Ltd., Chungcheongnam-do, KR;

Inventors:

Yong-Jun Seo, Gyeonggi-do, KR;

Sang Hyun Son, Busan, KR;

Ji Su Hong, Chungcheongnam-do, KR;

Jae Myoung Lee, Chungcheongnam-do, KR;

Dong Ok Ahn, Gyeonggi-do, KR;

Assignee:

SEMES CO., LTD., Chungcheongnam-Do, KR;

Attorney:

Carter, Deluca & Farrell LLP

Primary Examiner:

Ryan D Walsh

Int. Cl.
CPC ...
G01P 5/12 (2006.01); G01P 13/04 (2006.01); G01P 13/00 (2006.01); G01P 13/02 (2006.01);
U.S. Cl.
CPC ...
G01P 5/12 (2013.01); G01P 13/006 (2013.01); G01P 13/02 (2013.01); G01P 13/045 (2013.01);
Abstract

The inventive concept provides a wafer type sensor unit which acquires data on a wind direction and a wind velocity of an air flow during processing, the wafer type sensor unit supported by a supporting unit of a substrate processing apparatus. The unit comprising a wafer-shaped circuit board and a hot-wired wind velocity sensor placed apart from an upper surface of the circuit board.

Find Patent Forward Citations

Seo, Yong-Jun. (2023). Wafer type sensor unit and data acquisition method using the wafer type sensor unit (U.S. Patent No. 11703520). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11703520

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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