The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2023
Filed:
Sep. 06, 2022
Applicant:
Minebea Mitsumi Inc., Nagano, JP;
Inventors:
Toshiaki Asakawa, Shizuoka, JP;
Yuta Aizawa, Shizuoka, JP;
Shinya Toda, Shizuoka, JP;
Shintaro Takata, Nagano, JP;
Shinichi Niwa, Shizuoka, JP;
Assignee:
MINEBEA MITSUMI Inc., Nagano, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/20 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01); C23C 14/10 (2006.01); G01B 7/16 (2006.01); G01L 1/22 (2006.01);
U.S. Cl.
CPC ...
C23C 14/20 (2013.01); C23C 14/0063 (2013.01); C23C 14/0652 (2013.01); C23C 14/08 (2013.01); C23C 14/10 (2013.01); G01B 7/16 (2013.01); G01L 1/22 (2013.01); G01L 1/2281 (2013.01);
Abstract
A strain gauge includes a flexible substrate and a functional layer formed of a metal, an alloy, or a metal compound, the functional layer being directly on one surface of the substrate. The strain gauge includes a resistor formed of a film that includes Cr, CrN, and CrN and that is formed with α-Cr as a main component. The functional layer includes a function of promoting crystal growth of α-Cr and forming an α-Cr based film.