The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2023
Filed:
Oct. 15, 2020
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Byung Kyu Kim, Seoul, KR;
Dukhyun Son, Cheonan-si, KR;
Assignee:
Semes Co., Ltd., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01); B65G 47/90 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); B65G 47/90 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01); H01L 21/67196 (2013.01);
Abstract
Disclosed is an apparatus for transferring a substrate. The apparatus includes a transfer robot, a linear rail unit including a movable plate on which the transfer robot is mounted and a running shaft on which the movable plate travels, and a particle diffusion prevention member that prevents diffusion of particles to the outside by maintaining a differential pressure between the movable plate and the running shaft.