The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 11, 2023

Filed:

Jun. 28, 2021
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Akio Misaka, Hwaseong-si, KR;

Changsoo Kim, Hwaseong-si, KR;

Noyoung Chung, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/36 (2012.01); G06F 30/392 (2020.01); G06N 20/00 (2019.01);
U.S. Cl.
CPC ...
G03F 1/36 (2013.01); G06F 30/392 (2020.01); G06N 20/00 (2019.01);
Abstract

A non-transitory computer-readable medium storing codes that, when executed by a processor, cause the processor to perform operations of receiving full chip data including specific patterns of a first layout, extracting a representative pattern of the first layout from the full chip data, generating a vector of the extracted representative pattern, generating a first data set based on the generated vector, generating a machine learning model by performing machine learning with respect to the first data set, executing an optical proximity correction (OPC) with respect to the specific patterns of the first layout by using the machine learning model, and generating a second layout based on a result of executing the OPC may be provided.


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