The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2023
Filed:
Sep. 14, 2021
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Teruo Takizawa, Matsumoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01P 1/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); G01P 1/023 (2013.01); H01L 21/02 (2013.01); H01L 21/02532 (2013.01); H01L 21/02675 (2013.01); H01L 21/02691 (2013.01);
Abstract
Provided is a physical quantity sensor including: a movable body; a base body; and a lid body, in which the movable body is accommodated in a space between the base body and the lid body, the space is sealed with a melt portion obtained by melting a through hole provided in the lid body, the lid body and the melt portion contain silicon, and the melt portion has a continuous curved surface having unevenness.