The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2023
Filed:
Jul. 30, 2020
Corning Incorporated, Corning, NY (US);
Raymond Miller Karam, Santa Barbara, CA (US);
Eric Louis Null, Corning, NY (US);
CORNING INCORPORATED, Corning, NY (US);
Abstract
A system includes a stage, a detector and a measuring device. The stage is configured to hold a substrate. The substrate includes a plurality of tapered structures, and each of the plurality of tapered structures includes a tapered wall between first and second openings at opposite ends of the plurality of tapered structures. The detector is tilted at a first angle and configured to measure light reflected from the tapered wall at about 90 degrees to the tapered wall. The first angle depends at least in part a second angle between the tapered wall and a longitudinal axis running through the tapered structure. The measuring device is configured to determine a characteristic of the tapered wall and whether the characteristic of the tapered wall is above or below a threshold.