The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2023
Filed:
Aug. 21, 2020
Applicant:
Delta Electronics, Inc., Taoyuan, TW;
Inventors:
Assignee:
DELTA ELECTRONICS, INC., Taoyuan, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F23Q 7/22 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
F23Q 7/22 (2013.01); H05H 1/46 (2013.01);
Abstract
An ignition method of a plasma chamber includes steps of: (a) starting softly an ignition voltage to a first voltage, (b) decreasing the magnitude of the ignition voltage to a second voltage after a first ignition time, (c) increasing the magnitude of the ignition voltage to the first voltage after a second ignition time, and (d) repeating the step (b) and the step (c) until the ignition is successful.