The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2023
Filed:
Mar. 11, 2021
Applicant:
Evoqua Water Technologies Llc, Pittsburgh, PA (US);
Inventors:
Christopher Hall, Colorado Springs, CO (US);
Bruce Lee Coulter, Rockford, IL (US);
Assignee:
Evoqua Water Technologies LLC, Pittsburgh, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C02F 9/00 (2023.01); C02F 1/32 (2023.01); C02F 1/20 (2023.01); C02F 1/42 (2023.01); C02F 1/44 (2023.01); C02F 1/469 (2023.01); C02F 1/70 (2023.01); C02F 1/72 (2023.01); C02F 103/04 (2006.01); C02F 1/04 (2023.01); C02F 1/00 (2023.01); C02F 103/34 (2006.01);
U.S. Cl.
CPC ...
C02F 9/00 (2013.01); C02F 1/325 (2013.01); C02F 1/004 (2013.01); C02F 1/008 (2013.01); C02F 1/04 (2013.01); C02F 1/20 (2013.01); C02F 1/42 (2013.01); C02F 1/441 (2013.01); C02F 1/444 (2013.01); C02F 1/4693 (2013.01); C02F 1/4695 (2013.01); C02F 1/70 (2013.01); C02F 1/722 (2013.01); C02F 2001/427 (2013.01); C02F 2103/04 (2013.01); C02F 2103/346 (2013.01); C02F 2201/326 (2013.01); C02F 2201/3227 (2013.01); C02F 2209/20 (2013.01); C02F 2301/08 (2013.01); C02F 2303/18 (2013.01); C02F 2305/023 (2013.01);
Abstract
A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.