The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2023
Filed:
Feb. 12, 2020
Applicant:
Persimmon Technologies, Corp., Wakefield, MA (US);
Inventor:
Scott Wilkas, Lexington, MA (US);
Assignee:
Persimmon Technologies Corporation, Wakefield, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01S 13/88 (2006.01); B25J 19/02 (2006.01); H01L 21/67 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
B25J 19/021 (2013.01); B25J 11/0095 (2013.01); B25J 19/026 (2013.01); G01S 13/881 (2013.01); H01L 21/67259 (2013.01);
Abstract
An apparatus including at least one emitter configured to emit energy; at least one receiver configured to receive the emitted energy, where the at least one emitter is mounted on at least one of: a robot arm, an end effector of the robot arm, a substrate on the robot arm, or a substrate process module, where the at least one receiver is mounted on at least one of: the robot arm, the end effector of the robot arm, the substrate on the robot arm, or the substrate process module.