The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2023
Filed:
Apr. 21, 2020
Applicant:
Schott Ag, Mainz, DE;
Inventors:
Assignee:
SCHOTT AG, Mainz, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/14 (2006.01); C03C 17/28 (2006.01); H01J 37/32 (2006.01); B05D 1/00 (2006.01); B05D 7/22 (2006.01); C03C 17/00 (2006.01); A61M 5/31 (2006.01);
U.S. Cl.
CPC ...
B05D 3/147 (2013.01); A61M 5/3129 (2013.01); B05D 1/62 (2013.01); B05D 7/22 (2013.01); C03C 17/004 (2013.01); C03C 17/28 (2013.01); H01J 37/32394 (2013.01); A61M 2005/3131 (2013.01); B05D 2201/00 (2013.01); B05D 2203/35 (2013.01); B05D 2259/00 (2013.01);
Abstract
An apparatus and to a method for treating layers using a plasma zone sealed from the outer atmospheric pressure are provided. The apparatus and method include a plasma reactor including a substrate carrier in form of a container receiving means, and a closing element that is joined with the substrate carrier by means of a lifting device.