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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11696506 B1

PDFFull Text
Date of Patent:
Jul. 04, 2023

Filed:

Mar. 08, 2018

Piezoelectric device with orientation control layer formed of sazo and manufacturing method thereof

Applicant:

Nitto Denko Corporation, Ibaraki, JP;

Inventors:

Masaharu Arimoto, Ibaraki, JP;

Hironobu Machinaga, Ibaraki, JP;

Masato Katsuda, Ibaraki, JP;

Manami Kurose, Ibaraki, JP;

Assignee:

NITTO DENKO CORPORATION, Ibaraki, JP;

Attorney:

Hauptman Ham, LLP

Primary Examiner:

Shawki S Ismail

Assistant Examiner:

Monica Mata

Int. Cl.
CPC ...
H01L 41/08 (2006.01); H01L 41/047 (2006.01); H01L 41/113 (2006.01); H01L 41/187 (2006.01); H01L 41/316 (2013.01); H01L 41/319 (2013.01); H10N 30/00 (2023.01); H10N 30/076 (2023.01); H10N 30/079 (2023.01); H10N 30/30 (2023.01); H10N 30/853 (2023.01); H10N 30/87 (2023.01);
U.S. Cl.
CPC ...
H10N 30/10516 (2023.02); H10N 30/076 (2023.02); H10N 30/079 (2023.02); H10N 30/302 (2023.02); H10N 30/853 (2023.02); H10N 30/878 (2023.02);
Abstract

A piezoelectric device has a layered structure in which at least a first electrode, a plastic layer, an orientation control layer, a piezoelectric layer, and a second electrode are stacked, wherein the orientation control layer is amorphous, and the piezoelectric layer with a thickness of 20 nm to 250 nm is provided over the orientation control layer, the piezoelectric layer having a wurtzite crystal structure, and wherein the orientation control layer and the piezoelectric layer are provided between the first electrode and the second electrode.

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