The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2023
Filed:
Oct. 25, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Ian Widlow, Santa Clara, CA (US);
Govinda Raj, Santa Clara, CA (US);
Gary U. Keppers, Morgan Hill, CA (US);
Aravind Dugganna Naik, Bangalore, IN;
Francisco Rodarte, Fremont, CA (US);
Sudhir R. Gondhalekar, Pleasanton, CA (US);
Ravikumara Kodinaganhalli, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A component, a method of manufacturing a component, and a method of cleaning a component is provided. The component includes a gas flow system within the component, wherein the gas flow system fluidly couples one or more inlet holes and one or more outlet holes. The manufacturing of the component results in an arc shaped groove and a circumferential groove created in the body of the ring. The component undergoes one or more cleaning operations, including rinsing, baking, or purging operations. The cleaning operations remove debris or particles in or on the component, where the debris or particles can be caused during manufacturing of the component, or during use of the component in a semiconductor processing system.