Superresolution metrology methods based on singular distributions and deep learning

Abstract

Methods for determining a value of an intrinsic geometrical parameter of a geometrical feature characterizing a physical object, and for classifying a scene into at least one geometrical shape, each geometrical shape modeling a luminous object. A singular light distribution characterized by a first wavelength and a position of singularity is projected onto the physical object. Light excited by the singular light distribution that has interacted with the geometrical feature and that impinges upon a detector is detected and a return energy distribution is identified and quantified at one or more positions. A deep learning or neural network layer may be employed, using the detected light as direct input of the neural network layer, adapted to classify the scene, as a plurality of shapes, static or dynamic, the shapes being part of a set of shapes predetermined or acquired by learning.