The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2023
Filed:
Jun. 23, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Ricardo Martinez, Manteca, CA (US);
Hung Xuan Hoang, Milpitas, CA (US);
Dmitry Sklyar, San Jose, CA (US);
Farooq Aleem, Cupertino, CA (US);
Jagan Rangarajan, Fremont, CA (US);
William Wadsworth, Santa Clara, CA (US);
Brett Hoogensen, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.