The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 2023

Filed:

Jul. 06, 2021
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Teruo Takizawa, Matsumoto, JP;

Kazuyuki Nagata, Minowa, JP;

Satoru Tanaka, Chino, JP;

Seiji Yamazaki, Fujimi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/18 (2013.01); B81B 3/00 (2006.01); B81B 7/00 (2006.01); G01P 15/125 (2006.01); G01P 3/48 (2006.01);
U.S. Cl.
CPC ...
G01P 15/18 (2013.01); B81B 3/001 (2013.01); B81B 7/0016 (2013.01); G01P 15/125 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0181 (2013.01); G01P 3/48 (2013.01);
Abstract

In an inertial sensor, a first movable body configured to swing around a first rotation axisrotation axis along a first direction has an opening; the opening includes a second movable body configured to swing around a second rotation axisrotation axis along a second direction, a second support beam supporting the second movable body as the second rotation axisrotation axis, a third movable body configured to swing around a third rotation axisrotation axis along the second direction, and a third support beam supporting the third movable body as the third rotation axisrotation axis; and a protrusion is provided at a surface facing the second movable body and the third movable body, or at the second movable body and the third movable body, the protrusion protruding toward the second movable body and the third movable body or the surface.


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