The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 2023

Filed:

Sep. 04, 2020
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Kazuhiro Itsumi, Tokyo, JP;

Tomio Ono, Kanagawa, JP;

Yutaka Nakai, Kanagawa, JP;

Noriko Yamamoto, Kanagawa, JP;

Tsuyoshi Kobayashi, Kanagawa, JP;

Akiko Hirao, Kanagawa, JP;

Yasuharu Hosono, Kanagawa, JP;

Mitsunaga Saito, Chiba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01H 9/00 (2006.01); G01N 29/32 (2006.01); G01N 29/22 (2006.01); G01B 17/02 (2006.01); G01N 29/11 (2006.01); G01N 29/34 (2006.01); G01N 29/24 (2006.01); G01N 29/48 (2006.01); G07D 7/164 (2016.01); G07D 7/08 (2006.01); G07D 7/189 (2016.01);
U.S. Cl.
CPC ...
G01B 17/02 (2013.01); G01H 9/00 (2013.01); G01N 29/11 (2013.01); G01N 29/221 (2013.01); G01N 29/32 (2013.01); G01B 2210/44 (2013.01); G01N 29/2437 (2013.01); G01N 29/2462 (2013.01); G01N 29/348 (2013.01); G01N 29/48 (2013.01); G01N 2291/0237 (2013.01); G01N 2291/02809 (2013.01); G01N 2291/02854 (2013.01); G01N 2291/048 (2013.01); G01N 2291/105 (2013.01); G01N 2291/2632 (2013.01); G07D 7/08 (2013.01); G07D 7/164 (2013.01); G07D 7/189 (2017.05);
Abstract

A sensor includes a first element part having a first member and a first element. The first member is a acoustic tubular waveguide and extends along a first direction. The acoustic tubular waveguide includes a first opening and a second opening. A direction from the second opening toward the first opening is along the first direction. The first element includes a vibratile first membrane, and a first supporter supporting the first membrane. The second opening is between the first opening and the first membrane in the first direction. The sensor may be a Piezoelectric Micro electro mechanical systems Ultrasonic Transducer and may be used for inspecting paper and/or resin including detecting thickness of a fed through banknote and/or the presence of foreign matter thereon such as tape. An optical element may alternatively measure the vibration of a membrane from acoustic through transmission instead of an acoustic receiver.


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