The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 2023

Filed:

Sep. 01, 2020
Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Ruggero Anzalone, Viagrande, IT;

Nicolo′ Frazzetto, San Giovanni la Punta, IT;

Francesco La Via, Catania, IT;

Assignee:

STMICROELECTRONICS S.r.l., Agrate Brianza, IT;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 25/12 (2006.01); H01L 21/687 (2006.01); H01L 21/02 (2006.01); C23C 16/32 (2006.01); C23C 16/458 (2006.01); C30B 29/36 (2006.01); H01L 21/67 (2006.01); C23C 16/46 (2006.01); C30B 25/08 (2006.01);
U.S. Cl.
CPC ...
C30B 25/12 (2013.01); C23C 16/325 (2013.01); C23C 16/4583 (2013.01); C30B 29/36 (2013.01); C23C 16/4585 (2013.01); C23C 16/46 (2013.01); C30B 25/08 (2013.01); H01L 21/0262 (2013.01); H01L 21/02529 (2013.01); H01L 21/67011 (2013.01); H01L 21/6875 (2013.01); H01L 21/68785 (2013.01);
Abstract

An apparatus for growing semiconductor wafers, in particular of silicon carbide, wherein a chamber houses a collection container and a support or susceptor arranged over the container. The support is formed by a frame surrounding an opening accommodating a plurality of arms and a seat. The frame has a first a second surface, opposite to each other, with the first surface of the frame facing the support. The arms are formed by cantilever bars extending from the frame into the opening, having a maximum height smaller than the frame, and having at the top a resting edge. The resting edges of the arms define a resting surface that is at a lower level than the second surface of the frame. The seat has a bottom formed by the resting surface.


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