The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2023
Filed:
Jun. 18, 2021
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Somu Goswami, Munich, DE;
Christian Bretthauer, Munich, DE;
Matthias Friedrich Herrmann, Munich, DE;
Gunar Lorenz, Munich, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); H04R 3/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/008 (2013.01); H04R 3/002 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0285 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MEMS vibration sensor includes a membrane having an inertial mass, the membrane being affixed to a holder of the MEMS vibration sensor; and a segmented backplate spaced apart from the membrane, the segmented backplate being affixed to the holder.