The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2023

Filed:

Apr. 13, 2018
Applicant:

Sony Semiconductor Solutions Corporation, Kanagawa, JP;

Inventor:

Hidenobu Tsugawa, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 21/20 (2006.01); H01L 23/48 (2006.01); H01L 23/522 (2006.01); H04N 25/79 (2023.01);
U.S. Cl.
CPC ...
H01L 27/14689 (2013.01); H01L 27/1463 (2013.01); H01L 27/1469 (2013.01); H01L 27/14612 (2013.01); H01L 21/2007 (2013.01); H01L 23/481 (2013.01); H01L 23/5226 (2013.01); H01L 27/14636 (2013.01); H04N 25/79 (2023.01);
Abstract

The present disclosure relates to a semiconductor device, a manufacturing method, an imaging element, and an electronic device capable of reducing manufacturing steps in a stacked structure obtained by stacking two or more semiconductor substrates. The semiconductor device has a stacked structure obtained by stacking at least a first semiconductor substrate in which a first wiring layer is stacked on a first semiconductor layer and a second semiconductor substrate in which a second wiring layer is stacked on a second semiconductor layer. Then, a through via which electrically connects the first semiconductor substrate and the second semiconductor substrate to each other and penetrates at least the first semiconductor layer is formed in an embedded oxide film formed when element isolation of a semiconductor element formed in the first semiconductor layer is performed. The present technology is applicable to, for example, a stacked semiconductor device.


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