The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2023

Filed:

Apr. 06, 2021
Applicant:

Gatan, Inc., Pleasanton, CA (US);

Inventors:

John Andrew Hunt, Fremont, CA (US);

Michael Bertilson, Dublin, CA (US);

Assignee:

GATAN, INC., Pleasanton, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); G01J 3/02 (2006.01); G01J 3/44 (2006.01); G01N 21/66 (2006.01); H01J 37/22 (2006.01); H01J 37/285 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); G01J 3/021 (2013.01); G01J 3/0216 (2013.01); G01J 3/0218 (2013.01); G01J 3/4406 (2013.01); G01N 21/66 (2013.01); H01J 37/226 (2013.01); H01J 37/285 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/262 (2013.01); H01J 2237/2855 (2013.01);
Abstract

Apparatuses for collection of upstream and downstream transmission electron microscopy (TEM) cathodoluminescence (CL) emitted from a sample exposed to an electron beam are described. A first fiber optic cable carries first CL light emitted from a first TEM sample surface, into a spectrograph. A second fiber optic cable carries second CL light emitted from a second TEM sample surface into the spectrograph. The first and second fiber optic cables are positioned such that the spectrograph produces a first light spectrum for the first fiber optic cable and a separate light spectrum for the second fiber optic cable. The described embodiments allow collection of TEM CL data in a manner that allows analyzing upstream and downstream TEM CL signals separately and simultaneously with an imaging spectrograph.


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