The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2023

Filed:

Oct. 21, 2021
Applicant:

Massachusetts Institute of Technology, Cambridge, MA (US);

Inventors:

Robin Singh, San Jose, CA (US);

Anuradha M. Agarwal, Weston, MA (US);

Danhao Ma, Malta, NY (US);

Peter X. Su, Fairfax, VA (US);

Brian W. Anthony, Cambridge, MA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 15/02 (2006.01); G01N 21/552 (2014.01); G01N 33/543 (2006.01); G01N 21/39 (2006.01); G01N 15/06 (2006.01); G01N 21/77 (2006.01); G01N 21/45 (2006.01); G02B 6/12 (2006.01); G01N 15/00 (2006.01); G02B 6/293 (2006.01);
U.S. Cl.
CPC ...
G01N 15/0205 (2013.01); G01N 15/06 (2013.01); G01N 21/39 (2013.01); G01N 21/45 (2013.01); G01N 21/552 (2013.01); G01N 21/7703 (2013.01); G01N 21/7746 (2013.01); G01N 33/543 (2013.01); G01N 33/54373 (2013.01); G02B 6/12004 (2013.01); G02B 6/12007 (2013.01); G01N 2015/0046 (2013.01); G01N 2015/03 (2013.01); G01N 2015/0693 (2013.01); G02B 6/2938 (2013.01); G02B 6/29338 (2013.01);
Abstract

A photonic aerosol particle sensor includes a microfluidic sensor chamber in which is disposed a plurality of photonic waveguide resonators each having a photonic waveguide on an underlying substrate, along a separate waveguide resonator path with a lateral width different than that of other photonic waveguide resonators. All waveguides in the plurality have a common vertical thickness of a common waveguide material having a refractive index that is larger than that of the underlying substrate material. An optical input connection couples light into the waveguide resonators. An aerosol particle input fluidically connected to the microfluidic chamber fluidically conveys aerosol particles to the chamber, and an aerosol particle output fluidically connected to the microfluidic chamber fluidically conveys aerosol particles out of the chamber. At least one optical output connection accepts light out of the plurality of photonic waveguide resonators to provide a signal indicative of at least one aerosol particle characteristic.


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