The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2023
Filed:
Jan. 25, 2022
Xi'an Jiaotong University, Xi'an, CN;
Xudong Fang, Xi'an, CN;
Ziyan Fang, Xi'an, CN;
Chen Wu, Xi'an, CN;
Hao Sun, Xi'an, CN;
Libo Zhao, Xi'an, CN;
Bian Tian, Xi'an, CN;
Zhuangde Jiang, Xi'an, CN;
Wubin Deng, Xi'an, CN;
Bonan Gao, Xi'an, CN;
Junxia Wu, Xi'an, CN;
Songli Wang, Xi'an, CN;
Nan Zhu, Xi'an, CN;
XI'AN JIAOTONG UNIVERSITY, Xi'an, CN;
Abstract
A silicon carbide-based micro-electro-mechanical system (MEMS) combined temperature-pressure sensor chip and a preparation thereof. The chip includes a peripheric pressure-measuring unit and a center temperature-measuring unit. The pressure-measuring unit includes a silicon carbide substrate with a raised island and a pressure sensitive diaphragm formed by etching the back of the substrate. The raised island and the pressure-sensitive diaphragm constitute a membrane-island structure. Four piezoresistive strips are arranged symmetrically along a circumferential direction of a root of the pressure-sensitive diaphragm and between the raised island and the pressure-sensitive diaphragm. The temperature-measuring unit includes the raised island and a thin-film thermocouple arranged thereon.