The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2023

Filed:

Oct. 14, 2020
Applicant:

Riber, Bezons, FR;

Inventors:

Jean-Louis Guyaux, La Vernelle, FR;

Franck Stemmelen, Vaureal, FR;

Youri Rousseau, Maisons Laffitte, FR;

Assignee:

RIBER, Bezons, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01); C23C 14/26 (2006.01); C23C 14/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/243 (2013.01); C23C 14/0694 (2013.01); C23C 14/24 (2013.01);
Abstract

The invention relates to an evaporation cell () for vacuum evaporation chamber, the evaporation cell () comprising a crucible (), the crucible () being adapted to receive a solid or liquid material to be sublimated or evaporated, heating means () to heat the material in the crucible, a nozzle () placed at an open end of the crucible (), the nozzle () comprising a frustoconical portion () having an opening () adapted for the passage of a flow of evaporated or sublimated material towards the vacuum evaporation chamber, and a cover () placed on the nozzle (), the cover () having an opening () arranged about the frustoconical portion () of the nozzle (). According to the invention, the cover () has at least one frustoconical portion () arranged about the frustoconical portion () of the nozzle (), the cover () forming a thermal barrier between the crucible () and the vacuum evaporation chamber.


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