The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2023
Filed:
Dec. 30, 2020
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventors:
Tae Suk Yun, Chungcheongnam-do, KR;
Hyeon Suk Park, Chungcheongnam-do, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-do, KR;
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/08 (2006.01); B08B 3/02 (2006.01); B08B 13/00 (2006.01); B08B 3/10 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B08B 3/08 (2013.01); B08B 3/02 (2013.01); B08B 3/10 (2013.01); B08B 13/00 (2013.01); B08B 2203/007 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01);
Abstract
An apparatus for processing a substrate includes a housing having a processing space in which the substrate is processed, a support unit that supports the substrate in the processing space, a nozzle that dispenses a chemical onto the substrate placed on the support unit, a chemical supply unit that supplies the chemical to the nozzle, and a controller that controls the chemical supply unit.