The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2023
Filed:
Aug. 03, 2020
International Business Machines Corporation, Armonk, NY (US);
Kenneth P. Rodbell, Sandy Hook, CT (US);
Leonidas Ernesto Ocola, Wappingers Falls, NY (US);
Charles Thomas Rettner, San Jose, CA (US);
Mary E Rothwell, Ridgefield, CT (US);
Elbert Emin Huang, Mountain View, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Techniques regarding lithographic processes for fabricating Josephson junctions are provided. For example, one or more embodiments described herein can comprise a method that can include depositing a first resist layer onto a second resist layer. The first resist layer can include a bridge portion that defines an opening for forming a Josephson junction. The method can also comprise depositing a third resist layer onto the bridge portion. The third resist layer can shield the opening from an angled deposition of a superconducting material during fabrication of the Josephson junction.