The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 20, 2023

Filed:

Jan. 24, 2022
Applicant:

Headway Technologies, Inc., Milpitas, CA (US);

Inventors:

Santiago Serrano Guisan, San Jose, CA (US);

Luc Thomas, San Jose, CA (US);

Jodi Mari Iwata, San Carlos, CA (US);

Guenole Jan, San Jose, CA (US);

Ru-Ying Tong, Los Gatos, CA (US);

Assignee:

Headway Technologies, Inc., Milpitas, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10N 50/85 (2023.01); H10N 52/01 (2023.01); H10N 52/80 (2023.01); G11C 11/16 (2006.01); H01L 27/22 (2006.01); H01L 43/10 (2006.01); H01L 43/04 (2006.01); H01L 43/14 (2006.01); H01L 43/12 (2006.01);
U.S. Cl.
CPC ...
H10N 50/85 (2023.02); G11C 11/161 (2013.01); H10N 52/01 (2023.02); H10N 52/80 (2023.02);
Abstract

A perpendicular magnetic tunnel junction is disclosed wherein a metal insertion (MIS) layer is formed within a free layer (FL), a partially oxidized Hk enhancing layer is on the FL, and a nitride capping layer having a buffer layer/nitride layer (NL) is on the Hk enhancing layer to provide an improved coercivity (Hc)/switching current (Jc) ratio for spintronic applications. Magnetoresistive ratio is maintained above 100%, resistance×area (RA) product is below 5 ohm/μm, and thermal stability to 400° C. is realized. The FL comprises two or more sub-layers, and the MIS layer may be formed within at least one sub-layer or between sub-layers. The buffer layer is used to prevent oxygen diffusion to the NL, and nitrogen diffusion from the NL to the FL. FL thickness is from 11 Angstroms to 25 Angstroms while MIS layer thickness is preferably from 0.5 Angstroms to 4 Angstroms.


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