The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2023
Filed:
Mar. 16, 2020
Applicant:
SK Hynix Inc., Icheon-si, KR;
Inventors:
Han Na Goh, Icheon-si, KR;
Jae Taek Kim, Seoul, KR;
Assignee:
SK hynix Inc., Icheon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11556 (2017.01); H10B 41/27 (2023.01); H01L 21/768 (2006.01); G11C 5/06 (2006.01); G11C 5/02 (2006.01); H10B 43/27 (2023.01);
U.S. Cl.
CPC ...
H10B 41/27 (2023.02); G11C 5/025 (2013.01); G11C 5/06 (2013.01); H01L 21/76841 (2013.01); H10B 43/27 (2023.02);
Abstract
The semiconductor memory device includes a stack structure including first material films stacked, but spaced apart from each other, in a slimming region, the first material films being stacked in a step structure in the slimming region, a contact hole exposing a portion of the first material films formed in different layers in the slimming region, and a plurality of material films that are applied and etched to electrically connect one of the material layers to a peripheral circuit.