The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 20, 2023

Filed:

Jan. 14, 2022
Applicant:

Horiba Stec, Co., Ltd., Kyoto, JP;

Inventor:

Kazuya Shakudo, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 1/36 (2006.01); F16K 1/42 (2006.01); F16K 1/44 (2006.01); F16K 31/00 (2006.01); F16K 31/12 (2006.01); F16K 17/04 (2006.01); F16K 25/00 (2006.01); H01L 21/67 (2006.01); F16K 3/02 (2006.01); F16K 11/074 (2006.01);
U.S. Cl.
CPC ...
F16K 1/36 (2013.01); F16K 1/42 (2013.01); F16K 1/44 (2013.01); F16K 3/0218 (2013.01); F16K 17/04 (2013.01); F16K 25/005 (2013.01); F16K 31/007 (2013.01); F16K 31/12 (2013.01); H01L 21/67017 (2013.01); F16K 11/074 (2013.01);
Abstract

To avoid formation of surface sag formed when an internal flow path of a valve element is processed and to ensure a maximum flow rate in a fluid control valve where a seating surface of the valve element is formed of a resin layer, in a fluid control valve that includes a valve seat, and a valve element including resin layers provided in concave grooves formed on a facing surface facing the valve seat, the valve element further includes internal flow paths whose inflow ports are opened in a back surface facing away from the facing surface and whose outflow ports are opened in portions around the concave grooves on the facing surface, and counterbored portions are formed on sides of the inflow ports of the internal flow paths.


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