The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2023
Filed:
Jun. 04, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jennifer Y. Sun, Fremont, CA (US);
Biraja P. Kanungo, San Jose, CA (US);
Vahid Firouzdor, San Mateo, CA (US);
Tom Cho, Los Altos, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 18/00 (2006.01); C23C 14/08 (2006.01); C23C 14/22 (2006.01); H01J 37/32 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/08 (2013.01); B32B 18/00 (2013.01); C23C 14/083 (2013.01); C23C 14/22 (2013.01); C23C 14/228 (2013.01); C23C 14/34 (2013.01); H01J 37/32477 (2013.01); H01J 37/32495 (2013.01); Y10T 428/24355 (2015.01); Y10T 428/24967 (2015.01); Y10T 428/24975 (2015.01); Y10T 428/265 (2015.01);
Abstract
A chamber component for a process chamber comprises a ceramic body and one or more protective layer on at least one surface of the ceramic body, wherein the one or more protective layer comprises YAlOhaving a dielectric constant of 9.76+/−up to 30% and a hermiticity of 4.4E-10 cm/s+/−up to 30%.