The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2023
Filed:
Dec. 30, 2021
Applicant:
Hoya Corporation, Tokyo, JP;
Inventor:
Toshio Takizawa, Akishima, JP;
Assignee:
HOYA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); G11B 5/73 (2006.01); B24B 7/24 (2006.01); C03C 17/00 (2006.01); G11B 5/84 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); B24B 7/241 (2013.01); B24B 7/245 (2013.01); C03C 17/002 (2013.01); G11B 5/73921 (2019.05); G11B 5/8404 (2013.01);
Abstract
Letting a particle diameter be Dx (μm) when a cumulative particle volume cumulated from the small particle diameter side reaches x (%) of the total particle volume in a particle size distribution obtained regarding cerium oxide included in a polishing liquid using a laser diffraction/scattering method, D5 is 1 μm or less, and a difference between D95 and D5 is 3 μm or more.