The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Jan. 20, 2020
Samsung Electronics Co., Ltd., Suwon-si, KR;
Seok-Cheon Baek, Hwaseong-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A vertical memory device, including: a substrate including a cell array region and an extension region; gate electrodes stacked on each other with a plurality of levels, wherein each of the gate electrodes includes a pad, and wherein the pads disposed on the gate electrodes form at least one staircase structure on the extension region of the substrate; a channel extending in a first direction on the cell array region of the substrate through at least one of the gate electrodes; and dummy gate electrode groups disposed on the extension region of the substrate, wherein the dummy gate electrode groups includes dummy gate electrodes, wherein each of the dummy gate electrodes are spaced apart from a corresponding gate electrode among the gate electrodes stacked at a same level, wherein the dummy gate electrode groups are spaced apart from each other in a second direction.