The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Mar. 28, 2019
Georgia Tech Research Corporation, Atlanta, GA (US);
Georgia Tech Research Corporation, Atlanta, GA (US);
Abstract
Small form-factor MEMS devices and methods of using the devices are disclosed. An exemplary MEMS device includes an accelerometer contact microphone. Certain devices described herein comprise nanometer scale sensing gaps in the out-of-plane direction to increase vibration sensitivity in a vacuum casing. Certain devices described herein provide a differential sensing mechanism. The disclosure also describes accelerometer contact microphones having an operational bandwidth ranging from 0 Hz and 10,000 Hz. The vibration acceleration sensitivity of certain devices described herein is better 100 μg√Hz.
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