The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2023

Filed:

Feb. 02, 2021
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Yuuki Aburakawa, Tokyo, JP;

Tatsuo Namikawa, Tokyo, JP;

Akiyasu Iioka, Tokyo, JP;

Hitoshi Saita, Tokyo, JP;

Kazuhiro Yoshikawa, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01G 4/33 (2006.01); H01G 4/008 (2006.01); H01G 4/30 (2006.01); H01L 23/498 (2006.01); H01L 23/64 (2006.01); H01G 4/12 (2006.01);
U.S. Cl.
CPC ...
H01G 4/33 (2013.01); H01G 4/008 (2013.01); H01G 4/306 (2013.01); H01L 23/49822 (2013.01); H01L 23/642 (2013.01); H01G 4/1227 (2013.01); H01G 4/1245 (2013.01); H01G 4/1254 (2013.01);
Abstract

Disclosed herein a thin film capacitor that includes a lower electrode layer, an upper electrode layer, and a dielectric layer disposed between the lower electrode layer and the upper electrode layer. The dielectric layer has a through hole. An inner wall surface of the through hole has a first tapered surface and a second tapered surface surrounded by the first tapered surface. The first and second tapered surfaces are not covered with the upper electrode layer and have respective first and second taper angles with respect to a surface of the lower electrode layer. The second taper angle is smaller than the first taper angle.


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