The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2023

Filed:

May. 30, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Dongsik Shim, Hwaseong-si, KR;

Changgyun Shin, Anyang-si, KR;

Changbum Lee, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/025 (2006.01); H01S 5/02 (2006.01); H01L 21/304 (2006.01); G01S 7/481 (2006.01); H01S 5/028 (2006.01); H01S 5/30 (2006.01); H01S 5/00 (2006.01); H01S 5/40 (2006.01); G02F 1/29 (2006.01);
U.S. Cl.
CPC ...
G02F 1/025 (2013.01); G01S 7/4814 (2013.01); H01S 5/0071 (2013.01); H01S 5/0201 (2013.01); H01S 5/021 (2013.01); H01S 5/0218 (2013.01); H01S 5/0282 (2013.01); H01S 5/3013 (2013.01); H01S 5/4025 (2013.01); H01S 5/4075 (2013.01); G02F 1/292 (2013.01); G02F 2203/24 (2013.01); G02F 2203/50 (2013.01); H01S 5/005 (2013.01); H01S 2301/176 (2013.01);
Abstract

Provided in a method of fabricating an optical element array including providing a silicon substrate, providing a first element layer on the silicon substrate, the first element layer including a plurality of passive optical elements, providing a plurality of semiconductor blocks on a compound semiconductor wafer, providing semiconductor dies by dicing the compound semiconductor wafer by the plurality of semiconductor blocks, and providing a second element layer by providing the semiconductor dies on the first element layer, each of the plurality of semiconductor blocks contacting at least one corresponding passive optical element from among the plurality of passive optical elements.


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