The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2023

Filed:

Feb. 18, 2020
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Teruo Takizawa, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 15/08 (2006.01); B60R 21/0132 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); B60R 21/0132 (2013.01); G01P 15/0891 (2013.01); B60R 2021/01325 (2013.01);
Abstract

An inertial sensor includes a substrate, a sensor element provided on the substrate, a lid that covers the sensor element and is bonded to the substrate, and a plurality of terminals positioned outside the lid and electrically coupled to the sensor element, in which the plurality of terminals include an input terminal to which an electrical signal is input and a detection terminal for detecting a signal from the sensor element, and L1>L2, where L1 is a distance between the input terminal and the lid, and L2 is a distance between the detection terminal and the lid.


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