The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Nov. 12, 2018
Applicant:
Sciosense B.v., Eindhoven, NL;
Inventors:
Florin Udrea, Cambridge, GB;
Syed Zeeshan Ali, Cambridge, GB;
Assignee:
Sciosense B.V., AE Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/04 (2006.01); G01N 27/12 (2006.01); G01N 27/14 (2006.01); G01N 27/22 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/048 (2013.01); G01N 27/128 (2013.01); G01N 27/14 (2013.01); G01N 27/225 (2013.01); G01N 33/0036 (2013.01);
Abstract
A gas sensing device comprising a substrate comprising an etched cavity portion and a substrate portion, a dielectric layer disposed on the substrate, wherein the dielectric layer comprises a dielectric membrane, wherein the dielectric membrane is adjacent to the etched cavity portion of the substrate, a heater located within the dielectric layer; a material for sensing a gas; and one or more polysilicon electrodes coupled with the material for sensing a gas.