The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Aug. 11, 2021
Applicant:
Magnolia Optical Technologies, Inc., Woburn, MA (US);
Inventors:
Ashok K. Sood, Brookline, MA (US);
John W. Zeller, Woburn, MA (US);
Assignee:
Magnolia Optical Technologies, Inc., Wobum, MA;
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); H01L 37/02 (2006.01);
U.S. Cl.
CPC ...
G01J 5/20 (2013.01); H01L 37/025 (2013.01);
Abstract
A high-performance Microbolometer that incorporates vanadium oxide (VOx) along with carbon nanotubes (CNTs) or graphene. This Microbolometer, which uses a microbridge comprising Si3N4 and VOx, provides low noise and high dynamic range longwave infrared (LWIR) band detection. Addition of CNTs/graphene provides a high level of performance [low 1/f noise, noise equivalent temperature difference (NETD), and thermal time constant] due to the high temperature coefficient of resistance (TCR) of these materials.