The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2023

Filed:

Apr. 22, 2020
Applicant:

Dai Nippon Printing Co., Ltd., Tokyo, JP;

Inventors:

Isao Miyatani, Tokyo, JP;

Daigo Aoki, Tokyo, JP;

Masato Ushikusa, Tokyo, JP;

Yoshinori Murata, Tokyo, JP;

Hideyuki Okamoto, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 14/20 (2006.01); H10K 71/16 (2023.01); H10K 71/00 (2023.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/20 (2013.01); H10K 71/166 (2023.02); H10K 71/00 (2023.02);
Abstract

A deposition mask includes an effective part in which a plurality of openings are provided, and an outer frame part surrounding the effective part. The effective part includes an outer peripheral area that is adjacent to the outer frame part, and a central area which is surrounded by the outer peripheral area and has a thickness larger than a thickness of the outer peripheral area.


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