The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2023

Filed:

Oct. 29, 2020
Applicants:

International Business Machines Corporation, Armonk, NY (US);

The University of Basel, Basel, CH;

Inventors:

Gabriel Fernando Puebla Hellmann, Rueschlikon, CH;

Diego Monserrat Lopez, Zurich, CH;

Ute Drechsler, Rueschlikon, CH;

Marcel Mayor, Basel, CH;

Emanuel Marc Löertscher, Bonstetten, CH;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 1/00 (2006.01); B01L 3/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00119 (2013.01); B01L 3/502707 (2013.01); B01L 3/502715 (2013.01); B81B 1/002 (2013.01); B01L 2200/12 (2013.01); B01L 2300/12 (2013.01); B01L 2300/168 (2013.01); B81B 2201/058 (2013.01); B81B 2203/0353 (2013.01); B81B 2203/04 (2013.01); B81C 2201/0132 (2013.01); B81C 2201/0159 (2013.01); B81C 2201/0178 (2013.01);
Abstract

A device includes a first layer of an electrically insulating material and a second layer of a non-electrically insulating material (e.g., semiconductor or electrically conductive) extending on the first layer. The second layer is structured so as to define opposite, lateral walls of a microchannel, a bottom wall of which is defined by an exposed surface of the first layer. The second layer is further structured to form one or more electrical insulation barriers; each barrier includes a line of through holes, each surrounded by an oxidized region of the material of the second layer. The through holes alternate with oxidized portions of the oxidized region along the line. Each barrier extends, as a whole, laterally across the second layer up to one of the lateral walls and delimits two sections of the second layer on each side of the barrier and on a same side of the microchannel.


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