The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Apr. 28, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jose Manuel Dieguez-Campo, Hanau, DE;
Stefan Keller, Mainaschaff, DE;
Jae Won Lee, Aschaffenburg, DE;
Takashi Anjiki, Kyoto, JP;
Dieter Haas, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/04 (2006.01); B08B 3/08 (2006.01); B08B 7/00 (2006.01); B08B 9/08 (2006.01); C23C 14/12 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
B08B 7/04 (2013.01); B08B 3/08 (2013.01); B08B 7/0035 (2013.01); B08B 9/08 (2013.01); C23C 14/12 (2013.01); C23C 14/24 (2013.01); C23C 14/566 (2013.01); H01L 51/001 (2013.01); H01L 51/0011 (2013.01); H01L 51/56 (2013.01); B08B 2209/08 (2013.01);
Abstract
The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices. The method includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.