The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Mar. 10, 2020
Applicant:
Technetics Group Llc, Charlotte, NC (US);
Inventors:
Angus McFadden, Charlotte, NC (US);
Jason Wright, Charlotte, NC (US);
Assignee:
Technetics Group LLC, Charlotte, NC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/02 (2006.01); B05D 1/00 (2006.01);
U.S. Cl.
CPC ...
B05D 1/005 (2013.01); B05D 1/02 (2013.01);
Abstract
A method of depositing material to manufacture an electrostatic chuck is provided. The method first deposits at least one layer of a first dielectric material on a handle using spin coating and/or direct spraying method. A functional electric layer is next deposited on the at least one layer of the first dielectric material. Finally, the electrostatic chuck if formed by depositing at least one layer of a second dielectric material on the functional electric layer and the first dielectric material using spin coating and/or direct spraying method.