The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2023

Filed:

Sep. 22, 2020
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jisung Cheon, Ansan-si, KR;

Jiye Noh, Incheon, KR;

Byunggon Park, Seoul, KR;

Jinsoo Lim, Yongin-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/788 (2006.01); H01L 27/11582 (2017.01); G11C 7/18 (2006.01); H01L 23/522 (2006.01); H01L 27/11565 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); G11C 7/18 (2013.01); H01L 23/5226 (2013.01); H01L 27/11565 (2013.01);
Abstract

A vertical memory device includes a gate electrode structure, channels, a charge storage structure, and a division pattern. The gate electrode includes gate electrodes spaced apart from each other in a first direction. The channel extends through the gate electrode structure, and includes a first portion and a second portion on and contacting the first portion. The second portion includes a lower surface having a width less than that of an upper surface of the first portion. The charge storage structure covers an outer sidewall of the channel. The division pattern extends between the channels in a second direction, and includes a first dummy channel and a first dummy charge storage structure covering a sidewall and a lower surface thereof. The first dummy channel includes the same material as that the channel, and the first dummy charge storage structure includes the same material as the charge storage structure.


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