The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2023

Filed:

Nov. 15, 2019
Applicant:

Kelk Ltd., Kanagawa, JP;

Inventors:

Kazuhiro Mimura, Kanagawa, JP;

Atsushi Kobayashi, Kanagawa, JP;

Assignee:

KELK Ltd., Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G05D 23/19 (2006.01); F24H 15/414 (2022.01);
U.S. Cl.
CPC ...
G05D 23/1931 (2013.01); F24H 15/414 (2022.01); H01L 21/67248 (2013.01); F24H 2250/06 (2013.01);
Abstract

A temperature control device includes a smoother including a smoothing channel through which fluid from a first inlet flows, and a first outlet from which the fluid flowed through the smoothing channel flows out, the smoother making a temperature fluctuation amount of the fluid in the first outlet smaller than that in the first inlet, a thermoregulator including a second inlet into which the fluid from the first outlet flows, a thermoregulating channel through which the fluid from the second inlet flows, a thermoregulating unit regulating a temperature of the fluid flowing through the thermoregulating channel, and a second outlet from which the fluid flowed through the thermoregulating channel flows out, calculating a temperature regulation amount of the thermoregulating unit, based on temperature of the fluid in the smoothing channel, and calculating the temperature regulation amount, based on temperature of the fluid at a position downstream of the second outlet.


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