The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2023

Filed:

Sep. 02, 2020
Applicant:

Illinois Tool Works Inc., Glenview, IL (US);

Inventors:

Mohamed Saleem, Freemont, CA (US);

Arun Nagarajan, Freemont, CA (US);

Daniel Mudd, Freemont, CA (US);

Hossein Ghapanchizadeh, Freemont, CA (US);

Assignee:

Illinois Tool Works Inc., Glenview, IL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 7/01 (2006.01); G01F 1/36 (2006.01); G01F 15/00 (2006.01); F16K 1/32 (2006.01); F16K 1/36 (2006.01); F16K 1/42 (2006.01); F16K 27/02 (2006.01); F16K 31/06 (2006.01); F16K 37/00 (2006.01); F16K 17/04 (2006.01); H01L 21/67 (2006.01); G05D 7/06 (2006.01); F16K 1/00 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0113 (2013.01); F16K 1/32 (2013.01); F16K 1/36 (2013.01); F16K 1/42 (2013.01); F16K 17/04 (2013.01); F16K 27/02 (2013.01); F16K 27/029 (2013.01); F16K 31/0655 (2013.01); F16K 31/0675 (2013.01); F16K 37/0091 (2013.01); G01F 1/36 (2013.01); G01F 15/005 (2013.01); H01L 21/67017 (2013.01); H01L 21/67242 (2013.01); F16K 1/00 (2013.01); F16K 37/005 (2013.01); G05D 7/0635 (2013.01);
Abstract

A valve assembly for controlling fluid flow rate comprising a valve block, a valve, a sensor chip package, and a controller interface. The valve block having an upstream reservoir, a downstream reservoir, and a valve seat for communicating fluid from an upstream location to a downstream location. The valve having a moveable member. The sensor chip package having at least one sensor coupled with the valve. The controller interface is communicable coupled to a control unit, the valve, and the sensor chip package. The controller interface sends at least one parametric value provided by the sensor chip package to the control unit. The controller interface receives a control signal used to adjust valve stroke of the valve. The control signal of the valve is determined based on the at least one measured parametric value and at least one other parametric value provided by a fluid processing system.


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