The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Dec. 13, 2018
Ams Ag, Premstaetten, AT;
Technische Universität Graz, Graz, AT;
Jochen Kraft, Premstaetten, AT;
Georg Röhrer, Premstaetten, AT;
Fernando Jesus Castano Sanchez, Premstaetten, AT;
Anderson Pires Singulani, Premstaetten, AT;
Paul Maierhofer, Premstaetten, AT;
AMS AG, Premstaetten, AT;
TECHNISCHE UNIVERSITÄT GRAZ, Graz, AT;
Abstract
The particle sensor device comprises a substrate, a photodetector, a dielectric on or above the substrate, a source of electromagnetic radiation, and a through-substrate via in the substrate. The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide is arranged in or above the dielectric so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into a portion of the waveguide. A further portion of the waveguide is opposite the photodetector, so that said portions of the waveguide are on different sides of the through-substrate via, and the waveguide traverses the through-substrate via.