The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Jul. 28, 2021
Japan Atomic Energy Agency, Ibaraki, JP;
Junichiro Kamiya, Ibaraki, JP;
JAPAN ATOMIC ENERGY AGENCY, Ibaraki, JP;
Abstract
Provided is a vacuum component capable of evacuation by a getting effect, which has a large maximum number of captured molecules and a long working life. It is provided, in an area around its central axis, with a hollow cylindrical electrodehaving an electrode surfaceA that is sufficiently smaller than an inner surfaceA of the vacuum container, along the central axis. In the vacuum container, it is possible to realize any one of states among a first state of generating DC discharge by introducing Ar into the inside and setting the electrode surfaceA at a positive potential, a second state of setting the electrode surfaceA at a ground potential without introducing Ar, and a third state of generating DC discharge by introducing Ar into the inside and setting the electrode surfaceA at a negative potential. Evacuation by the vacuum componentis performed in the second state. Further, evacuation by the vacuum componentis performed also by realizing a state of performing a heating process at 400° C. or below without using the electrode.