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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11668011 B1

PDFFull Text
Date of Patent:
Jun. 06, 2023

Filed:

Nov. 26, 2019

Forming method of yttrium oxide fluoride coating film and yttrium oxide fluoride coating film prepared thereby

Applicants:

Jae Hyuk Park, Gyeonggi-do, KR;

Dae Gean Kim, Gyeonggi-do, KR;

Hye Won Seok, Seoul, KR;

Byung Ki Kim, Gyeonggi-do, KR;

Inventors:

Jae Hyuk Park, Gyeonggi-do, KR;

Dae Gean Kim, Gyeonggi-do, KR;

Hye Won Seok, Seoul, KR;

Byung Ki Kim, Gyeonggi-do, KR;

Assignee:

IONES CO., LTD., Gyeonggi-do, KR;

Attorney:

Reinhart Boerner Van Deuren P.C.

Primary Examiner:

Michael E La Villa

Int. Cl.
CPC ...
C23C 24/08 (2006.01); C23C 24/06 (2006.01); C01F 17/259 (2020.01); B32B 18/00 (2006.01); C23C 16/44 (2006.01); C23C 24/04 (2006.01); H01L 21/324 (2006.01); C23C 4/123 (2016.01); C23C 30/00 (2006.01); C23C 4/10 (2016.01); C23C 24/00 (2006.01); B32B 15/04 (2006.01); C23C 4/11 (2016.01); C23C 4/12 (2016.01); C23C 4/134 (2016.01); C23C 4/137 (2016.01);
U.S. Cl.
CPC ...
C23C 24/085 (2013.01); B32B 15/04 (2013.01); B32B 18/00 (2013.01); C01F 17/259 (2020.01); C23C 4/10 (2013.01); C23C 4/11 (2016.01); C23C 4/12 (2013.01); C23C 4/123 (2016.01); C23C 4/134 (2016.01); C23C 4/137 (2016.01); C23C 16/4404 (2013.01); C23C 24/00 (2013.01); C23C 24/04 (2013.01); C23C 24/06 (2013.01); C23C 24/08 (2013.01); C23C 30/00 (2013.01); C23C 30/005 (2013.01); H01L 21/324 (2013.01); Y10T 428/12611 (2015.01); Y10T 428/12618 (2015.01); Y10T 428/12993 (2015.01); Y10T 428/2495 (2015.01); Y10T 428/24967 (2015.01); Y10T 428/24983 (2015.01); Y10T 428/265 (2015.01);
Abstract

A forming method of an yttrium oxide fluoride (YOF) coating film and a (YOF) coating film formed thereby are disclosed. The YOF coating film has no or extremely small pores therein and a nanostructure to increase light transmittance thereof, and has high hardness and high bonding strength and thus can protect a transparent window of a display device. The method for forming an YOF coating film involves the steps of: providing pretreated YOF powder having a particle diameter ranging from 0.1 to 12 μm; receiving a transfer gas supplied from a transfer gas supply unit and receiving the pretreated YOF powder supplied from a powder supply unit to transfer the pretreated YOF powder in an aerosol state; and colliding/smashing (spraying) the pretreated YOF powder transferred in the aerosol state with/onto a substrate in a process chamber to form an YOF coating film on the substrate.

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