The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Dec. 16, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Vibhu Jindal, San Jose, CA (US);
Sanjay Bhat, Singapore, SG;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/35 (2006.01); C23C 14/04 (2006.01); C23C 14/34 (2006.01); C23C 14/18 (2006.01);
U.S. Cl.
CPC ...
C23C 14/351 (2013.01); C23C 14/042 (2013.01); C23C 14/185 (2013.01); C23C 14/3407 (2013.01); H01J 37/3408 (2013.01); H01J 37/3429 (2013.01);
Abstract
A deposition system, and a method of operation thereof are disclosed. The deposition system comprises a cathode assembly comprising a rotating magnet assembly including a plurality of outer peripheral magnets surrounding an inner peripheral magnet.