The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Mar. 03, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Guodong Zhan, Dhahran, SA;
Xiaowei Wu, San Jose, CA (US);
Xiao Ming He, Fremont, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/505 (2006.01); C23C 16/30 (2006.01); C23C 16/455 (2006.01); C23C 4/134 (2016.01); C23C 4/10 (2016.01); C04B 35/628 (2006.01); C04B 35/622 (2006.01); C04B 35/64 (2006.01); C04B 35/632 (2006.01); C23C 16/44 (2006.01); C04B 35/486 (2006.01); C23C 14/34 (2006.01); C04B 35/645 (2006.01); C23C 16/40 (2006.01); C01F 17/265 (2020.01); C01F 17/218 (2020.01);
U.S. Cl.
CPC ...
C04B 35/505 (2013.01); C01F 17/218 (2020.01); C01F 17/265 (2020.01); C04B 35/486 (2013.01); C04B 35/62222 (2013.01); C04B 35/62813 (2013.01); C04B 35/62815 (2013.01); C04B 35/62823 (2013.01); C04B 35/62828 (2013.01); C04B 35/62884 (2013.01); C04B 35/62889 (2013.01); C04B 35/62897 (2013.01); C04B 35/6325 (2013.01); C04B 35/64 (2013.01); C04B 35/645 (2013.01); C23C 4/10 (2013.01); C23C 4/134 (2016.01); C23C 14/3414 (2013.01); C23C 16/30 (2013.01); C23C 16/405 (2013.01); C23C 16/4417 (2013.01); C23C 16/45525 (2013.01); C23C 16/45555 (2013.01); C01P 2004/64 (2013.01); C01P 2004/84 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3227 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/441 (2013.01); C04B 2235/445 (2013.01); C04B 2235/52 (2013.01); C04B 2235/528 (2013.01); C04B 2235/5454 (2013.01); C04B 2235/666 (2013.01); C04B 2235/77 (2013.01); C04B 2235/96 (2013.01); C04B 2235/9607 (2013.01);
Abstract
Methods of forming nanoceramic materials and components. The methods may include performing atomic layer deposition to form a plurality of nanoparticles, including forming a thin film coating over core particles, or sintering the nanoparticles in a mold. The nanoparticles can include a first material selected from a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof.