The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2023
Filed:
Jul. 18, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Xiaowei Wu, San Jose, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C04B 35/48 (2006.01); C04B 35/505 (2006.01); C09D 1/00 (2006.01); C23C 16/455 (2006.01); C04B 35/50 (2006.01); C07F 7/00 (2006.01); C07F 5/00 (2006.01);
U.S. Cl.
CPC ...
C04B 35/48 (2013.01); C04B 35/50 (2013.01); C04B 35/505 (2013.01); C09D 1/00 (2013.01); C23C 16/45525 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3248 (2013.01); C07F 5/00 (2013.01); C07F 7/00 (2013.01);
Abstract
Embodiments of the present disclosure relate to articles, coated articles and methods of coating such articles with a rare earth metal containing oxide coating. The coating can contain at least a first metal (e.g., a rare earth metal, tantalum, zirconium, etc.) and a second metal that have been co-deposited onto a surface of the article. The coating can include a homogenous mixture of the first metal and the second metal and does not contain mechanical segregation between layers in the coating.